| abstract |
A slurry containing abrasive grains and water is provided. The abrasive grains include a 4 valent cerium hydroxide, and the light transmittance of a water dispersion is 50%/cm or more relative to the light with 500 nm wavelength, wherein the content of the abrasive grains is adjusted to 1.0 wt% in the water dispersion. An abrasive solution containing abrasive grains, a additive agent and water is provided. The abrasive grains include a 4 valent cerium hydroxide, and the light transmittance of the water dispersion is 50%/cm or more relative to the light with 500 nm wavelength, wherein the content of the abrasive grains is adjusted to 1.0 wt% in the water dispersion. |