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publicationDate 2011-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201131683-A
titleOfInvention Auto-sequencing multi-directional inline processing apparatus
abstract An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.
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