| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C303-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C303-28 |
| filingDate |
2010-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ce997496ad602504ce5bcdd2f965aa |
| publicationDate |
2011-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201131303-A |
| titleOfInvention |
Radiation-sensitive resin composition and compound contained therein |
| abstract |
A radiation-sensitive resin composition comprising: a compound (A) represented by general formula (A) (wherein R1 and R2 independently represent a substituted or unsubstituted univalent hydrocarbon group having 1 to 25 carbon atoms; X and Z independently represent a substituted or unsubstituted bivalent hydrocarbon group having 1 to 25 carbon atoms; Y represents a single bond or the like; and n represents an integer of 0 to 5); a solvent (B); and a resin (C) having an acid-labile group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9274420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I491586-B |
| priorityDate |
2009-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |