| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6b57d4591c2b87bb7b1450eadf70f1b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2004-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c73087d90af3e25a6cb9902fa6c4c575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2c13adb55fb77165cc593efa428d8c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3daf47443f44828c90c12e2b02a4ec45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_476a6347343ba8a27fec8fc1b6f623dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db278791270cd5cba1507c2a5b5c2456
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53d947af60fd0337eb701f146048b6a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5997c998dd814439665f3a9ad5cf24f3 |
| publicationDate |
2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201130402-A |
| titleOfInvention |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
| abstract |
Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9363881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I807210-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I715938-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I486996-B |
| priorityDate |
2003-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |