| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c754156d9ab873a2efe5a3990dbf627 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e823e9e83d3c8cd8a05adeaf0379783f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c28e5316a9779711d0711874fe9b508
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_011a89626d183842e6fcc20a55c63386
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6e2744135ff4224bfc3b80c86bf4f71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cbc4b6d7e7735bb87b7531bf4a90548
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e11ac53daf838230d3c127c4249eef |
| publicationDate |
2011-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201128707-A |
| titleOfInvention |
Active device array substrate and fabricating method thereof |
| abstract |
An active device array substrate includes a substrate and at least one patterned multiple metal layer. The patterned multiple metal layer is disposed on the substrate, wherein the patterned multiple metal layer at least includes a copper layer. The patterned multiple metal layer is formed by etching with an etchant, wherein the etchant includes an oxidant, a pH value adjuster and a metal ion chelating agent. A cross-section of the patterned multiple metal layer which is perpendicular to the substrate is a trapezoid, and a base angle of the trapezoid is less than 60 DEG C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I467724-B |
| priorityDate |
2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |