| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B35-183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B35-184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B35-189 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate |
2010-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da244b4a898850a8287f6b5a6bcbde30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e620873ad26bc8e82fcf17bea69f89f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4516ce719ab3a4de928c360166d9699a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b962e9e367f4950fdb6984c5f214a32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c3800858d26a8d52d310e449293ca7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_470e34ef5ec5f3fcf7f8d7b047197b7d |
| publicationDate |
2011-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201126636-A |
| titleOfInvention |
Substrate transport system and method |
| abstract |
A substrate transport system adapted for transporting a substrate moving in a substrate transport direction in a processing chamber is provided. The substrate transport system includes a plurality of transport rollers each having a transport shaft and a transport wheel. The transport shaft and the transport wheel are adapted for supporting the moving substrate. A heating means is arranged between the position of the moving substrate and the transport shaft and is adapted for heating the moving substrate. |
| priorityDate |
2009-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |