http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201125997-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1784eb7fc902d292db30e120ec712d5 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F2998-00 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C32-0052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C32-0068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C32-0026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-183 |
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-851 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C19-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
filingDate | 2010-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb57f9dea621ec4b105c9ddafa85c528 |
publicationDate | 2011-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201125997-A |
titleOfInvention | Ferromagnetic-material sputtering target of nonmagnetic-material particle dispersion type |
abstract | A ferromagnetic-material sputtering target of a nonmagnetic-material particle dispersion type which comprises a mixture of particles of a nonmagnetic material and an alloy comprising 5-20 mol% Cr, 5-30 mol% Pt, and Co as the remainder, characterized by having a structure comprising a phase (A) composed of the alloy and the nonmagnetic-material particles evenly microdispersed therein and a spherical alloy phase (B) dispersed in the phase (A), the proportion of the phase (B) being 4-40 vol.% of the target. The ferromagnetic-material sputtering target of a nonmagnetic-material particle dispersion type improves leakage flux to enable a stable electric discharge to be obtained with a magnetron sputtering device. The target has a high density and generates few particles during sputtering. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502224-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I496913-B |
priorityDate | 2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.