http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201122163-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aa485d286850898ac84bdb906bc1a41 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 |
| filingDate | 2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9443ad6d09cd08379d89978bdcc5ff7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fec44cb6142278f913a9e75a1c079099 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4120e45292eed777fad2ca561210abc6 |
| publicationDate | 2011-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201122163-A |
| titleOfInvention | Electrolyte and method for the electroplating of copper on a barrier layer, and semiconductor substrate obtained with said method |
| abstract | The invention relates to an electrolyte for copper electroplating on a copper diffusion barrier layer (B), the barrier layer (B) covering a surface of a semiconductor substrate (S), said electrolyte comprising: a source of copper ions; a solvent; wherein the electrolyte has a neutral or basic pH and comprises a suppressor (10) adapted to adsorb directly on the barrier layer (B) so as to at least partially mask the surface of the barrier layer (B). The invention also relates to a method for the electroplating of copper on a barrier layer using said electrolyte, and a semiconductor substrate comprising a copper layer formed using said method. |
| priorityDate | 2009-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.