http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201120232-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-08
filingDate 2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86d634fa17da2c5f1901bd13e74c36e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e7ba3729dc27cf4aaf4d7afd1974a8
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publicationDate 2011-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201120232-A
titleOfInvention Deposition of alkaline earth metal fluoride films in gas phase at low temperature
abstract Disclosed are thermal and/or plasma-enhanced CVD, ALD, and/or pulse CVD processes to deposit alkaline earth metal fluoride-based films, such as MgF2, at temperatures ranging from about 25 DEG C to about 300 DEG C, preferably from about 50 DEG C to about 250 DEG C, and more preferably from about 100 DEG C to about 200 DEG C.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104350175-A
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priorityDate 2009-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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