| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d4914041481b14c69ec0c4b48e9e372 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-082 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-10 |
| filingDate |
2010-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e7b6e40b2f8893f5221114379c6322b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88aa505b1c0b316344138c5b66384410
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4b9676d3199007eb55a35bea6482570
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d9023015944618cdd5b8f9952ceb1c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68f6d6237ea7ce5ffe9c164a23d56ae3 |
| publicationDate |
2011-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201111082-A |
| titleOfInvention |
Acousto-optic deflector applications in laser processing of dielectric or other materials |
| abstract |
A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of a laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I649932-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I583477-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I637803-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9527159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I745122-B |
| priorityDate |
2009-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |