http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201111061-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76cbc6d0f721fb0c9c7ac7aa3157e27d |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13415 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67748 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1339 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1341 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1303 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C13-00 |
filingDate | 2010-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7479377c05a23c81702a3a9525b6d66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18e12dc6516fd090174f8d2a8656ea34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_561e4b5fad75e098b8049d5e0d93c3fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4958b125d002687f15af2884872a15b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da3cf8060fd4320e26d6c416d5c27961 |
publicationDate | 2011-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201111061-A |
titleOfInvention | Coating device and coating method |
abstract | The subject of this invention is to reduce whirled-up dust while shortening the production time. The solution of this invention is as follows. Gantries (2a-2c) respectively having different coating functions and a workpiece table (6) on which a glass substrate (17) is placed are provided on a base stand (1) movably in an X(T) axis direction. When the workpiece table (6) is located at A position, a first coating operation is performed on the glass substrate (17) by the coating head (8) of the gantry (2a); when the workpiece table (6) is located at B position, a second coating operation is performed on the glass substrate (17) by the coating head (8) of the gantry (2b); and when the workpiece table (6) is located at C position, a third coating operation is performed on the glass substrate (17) by the coating head (8) of the gantry (2c). At the substrate feed-in side (a), the glass substrate (17) subjected to coating treatment is transported from a feed-in side transport conveyor (18a) while keeping the height the same as that on the workpiece table (6); and at the substrate feed-out side (b), the treated glass substrate (17) is transported from the workpiece table (6) while keeping the height the same as that on a feed-out side transport conveyor (18b). |
priorityDate | 2009-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3033151 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419499693 |
Total number of triples: 23.