Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-94 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D165-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D165-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
filingDate |
2010-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_823a50a899fad4e6a351fe7fa1eb408d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_526ef3dee706861f08a32fb49b1c3e87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_258586470f7f6a304a246a44ab1225a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cf4da890e112363dcb4e8df88df4146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_115725e452e53e63ed2fdd936e2563c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_280f8740a51755ee1342f9add341b514 |
publicationDate |
2011-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201107885-A |
titleOfInvention |
Spin on organic antireflective coating composition comprising polymer with fused aromatic rings |
abstract |
The present invention relates to an organic spin on hard mask antireflective coating composition comprising a polymer comprising at least one unit of fused aromatic rings in the backbone of the polymer and at least one unit with a cycloaliphatic moiety in the backbone of the polymer. The invention further relates to a process for making the polymer and a process for imaging the present composition. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9090119-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I473206-B |
priorityDate |
2009-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |