| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2010-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0203f287cca513d3149f2fdd0b994731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1962443a8bb7251fb72b39e0cbde8667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd39bc3485b509c202b58568701d2b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a4989456e9a28319e86925164979a38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1866c9b5ab3c924c42882ccfe37388f2 |
| publicationDate |
2011-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201101416-A |
| titleOfInvention |
Electrostatic chuck with polymer protrusions |
| abstract |
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10131126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I612609-B |
| priorityDate |
2009-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |