| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-083 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 |
| filingDate |
2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_114019b28ae707241bb194f2a5e718ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd630da97bd70a444e6c45fca2b7b439 |
| publicationDate |
2010-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201044443-A |
| titleOfInvention |
Method of forming carbon-containing layer |
| abstract |
A method of forming a carbon-containing layer is provided. First, a substrate is provided and a target layer is formed thereon. Thereafter, by using a plasma containing CxHyFz, a plasma deposition process is performed to the substrate to form a carbon-containing layer on the target layer. |
| priorityDate |
2009-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |