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publicationDate 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201036215-A
titleOfInvention Light emitting element producing method and light emitting element
abstract Disclosed is a light emitting element producing method wherein a light emitting element for a group-III to V compound semiconductor having a quantum well structure containing In and N is produced. The light emitting element producing method is comprised of a step of forming a well layer (13a) containing In and N; a step of forming a barrier layer (13b), the band gap of which is wider than that of the well layer (13a); and a step of interrupting an epitaxial growth by supplying gas containing N between the step of forming the well layer (13a) and the step of forming the barrier layer (13b). In the interrupting step, gas having a degradation efficiency higher than the degradation efficiency obtained when N2 and NH3 are degraded to active nitrogen at 900 DEG C is supplied. Further, in the interrupting step, gas different from a supply source which supplies N of the well layer (13a) is supplied.
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