| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3112c402d40ae2ef8f5001124fbe1aaf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-541 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B9-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B9-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6776
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B9-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B9-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B9-20 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2009-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_859b3fdf18d783f1bc1cc954e8f116b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20218043f15ca3613ac5b699358f1bd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fd85c8fb698aab90c95eace0c7916ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e3b50555409f5ba381afc4f3d6e7f4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e49624c2b81e0372d7cf11d63436ff3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00625f445a07367febec724265df360f |
| publicationDate |
2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201036191-A |
| titleOfInvention |
Reactor to form solar cell absorbers |
| abstract |
A roll-to-roll or reel-to-reel RTP tool including a reactor having a continuous insert placed in a primary gap of the reactor is provided. The primary gap of the reactor is defined by peripheral reactor walls including a top reactor wall, a bottom reactor wall and side reactor walls. The continuous insert includes a continuous process gap through which a continuous workpiece travels between an entry opening and an exit opening of the insert. An inner space exists between at least one of the insert walls and at least a portion of the peripheral reactor walls that make up the primary gap. At least one gas inlet is connected to the inner space, and at least one exhaust opening connects the process gap as well as the inner space to outside the reactor and carries any gaseous products to outside the process gap and the primary gap of the reactor. Sealable doors or web valves seal the entrance and the exit of the process gap when needed before or after the process, especially when the continuous workpiece stops moving. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I481059-B |
| priorityDate |
2008-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |