http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201036036-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 |
| filingDate | 2009-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e943bf145fa653f79170c7527200205b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0eb143343486772a62edca6f0431e33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46ac6a6abcdf205ee6c8762130a2deeb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d96f8e57eb0f0e1a17888ccc1e73ae4 |
| publicationDate | 2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201036036-A |
| titleOfInvention | Nitride semiconductor substrate and method for manufacturing the same |
| abstract | A nitride semiconductor substrate and a method for manufacturing the same are provided. The nitride semiconductor substrate includes a hetero-substrate, a nitride base layer, a nitride semiconductor film and a mask layer, wherein the nitride base layer consists of a plurality of first patterned arranged pillars and a plurality of second patterned arranged pillars. The nitride base layer is formed on the substrate, wherein a cross-section of each of second pillars is equal to or less than that of each of first pillars, and a distance between the plurality of second pillars is equal to or more than that between the plurality of first pillars. Surfaces of the hetero-substrate, the plurality of first pillars and the plurality of second pillars are covered by the mask layer. The nitride semiconductor film is formed on the nitride base layer. |
| priorityDate | 2009-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.