http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201033747-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7fd3e64e911494b86aa1480a764e5d31 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G04B29-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G04B19-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G04B31-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D1-003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2009-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d5d5cf331bda6c2506a99260d81e981 |
| publicationDate | 2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201033747-A |
| titleOfInvention | Heterogeneous LIGA method |
| abstract | The method of fabricating metal microstructures includes the following steps: (a) taking a substrate (1, 2) that has a conductive strike surface (2); (b) to (d) forming a first resin mould (3b) by UV photolithography, the apertures in the first resin mould revealing the conductive strike surface (2) of the substrate; (e) electroforming the first element (5) by galvanic deposition of a first metal material in the apertures of the first resin mould (3b), (f) removing the first mould (3b) around the first element (5) to expose the conductive strike surface (2) of the substrate; (g) to (i) forming a new resin mould (7b) by UV photolithography, the apertures in the new resin mould revealing the first element (5), and the conductive strike surface (2) of the substrate; (j) electroforming the second element (10) by galvanic deposition of a second metal material in the apertures of the new resin mould (7b) to form said metal microstructure; (k) separating said metal microstructure from the substrate (1) and from said new mould (7b). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I633019-B |
| priorityDate | 2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.