http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201033410-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81bbed339049c84138a09736b647d40e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-00 |
| filingDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_397e13c12797c84f3fd0e86ed74ad4d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c97736ae7bd7dbc8c7d8ee47c29245e3 |
| publicationDate | 2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201033410-A |
| titleOfInvention | Electro-thinning apparatus for removing excess metal on surface of substrate and removing method using the same |
| abstract | An electro-thinning apparatus for removing excess metal on the surface of the substrate includes an electrolysis bath containing electrolysis liquid; a transportation system disposed in the electrolysis bath for moving a substrate from an upstream end to a downstream end, wherein the substrate is immersed in the electrolysis liquid; an anode roller disposed relative to the electrolysis bath, and located at the upstream of the transportation system; a cathode roller disposed above the transportation system and located downstream to the anode roller, and the bottom of the cathode roller is dipped into electrolysis liquid; at least a shielding plate located downstream to the cathode roller for shielding the downstream portion of the transportation system. During the operation of the electro-thinning apparatus for removing excess metal, the anode roller contacts a surface of the substrate while a distance is kept between the cathode roller and the surface of the substrate. When the surface of the substrate contacts the anode roller and the substrate is moved towards the downstream end of the transportation system, there is an electrical field between the surface of the substrate and the cathode roller, and electrolysis occurs until the surface shielded by the shielding plate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113058536-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113058536-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I565546-B |
| priorityDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.