http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201031696-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-101 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 |
| filingDate | 2009-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2cdfdb7a2bcaed73932a50e34f222e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8485b35a7c1a21ef9becb14e20570676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18443fb56f0942e465bb1a21b5af20fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cb73d2f3d5841f9c78cfa6e04352ca6 |
| publicationDate | 2010-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201031696-A |
| titleOfInvention | Resist pattern coating agent and process for producing resist pattern using the same |
| abstract | Disclosed is a resist pattern coating agent which can smoothly contract a resist pattern by a heat treatment and can be easily removed by an aqueous alkaline solution treatment performed thereafter. The resist pattern coating agent contains a resin, a crosslinking agent and a solvent, and the crosslinking agent contains a compound represented by formula (1). In formula (1), A and D each independently represents a single bond, a methylene group, a linear or branched alkylene group having 2-10 carbon atoms, or a divalent cyclic hydrocarbon group having 3-20 carbon atoms; E represents a linear or branched alkyl group having 1-10 carbon atoms or a monovalent cyclic hydrocarbon group having 3-20 carbon atoms; m represents an integer of 2-4; and n represents 0 or 1. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I570525-B |
| priorityDate | 2008-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 193.