| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2009-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7cec2d3a249675009d79cceab3b5f3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da4de9cb4c2dd95cda5bbd41cf66a72c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7664f7da0301c6b2f7cb74090de8f63f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32f8e0b9b483e157eaef6ba8d5f11353 |
| publicationDate |
2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201027703-A |
| titleOfInvention |
Semiconductor device and methods for froming the same |
| abstract |
A semiconductor device is provided, having one or more through-silicon vias (TSVs). The TSVs are formed such that sidewalls of the TSVs have a scalloped surface. In an embodiment, the sidewalls of the TSVs are sloped wherein a top and bottom of the TSVs have different dimensions. The TSVs may have a V-shape wherein the TSVs have a wider dimension on a circuit side of the substrate, or an inverted V-shape wherein the TSVs have a wider dimension on a backside of the substrate. The scalloped surfaces of the sidewalls and/or sloped sidewalls allow the TSVs to be more easily filled with a conductive material such as copper. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9257337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9041163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I739770-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I476819-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I492345-B |
| priorityDate |
2009-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |