http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201027064-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98bbc186b0291ed5603de229258a7a95 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-213 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
| filingDate | 2009-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_345d1db85c9372669b45e9bdebeaca9e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_132478c252829645d5fd0fdcfd5f67e1 |
| publicationDate | 2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201027064-A |
| titleOfInvention | Optical measurement device, record medium performable by computer , and measurement method |
| abstract | An optical measurement device is provided, which can easily calculate the film thickness or optical constant of each layer across measurement object areas of a sample. A first measurement means measures light polarization states after a measurement position is moved to a stored first base position. An auxiliary measurement means measures light polarization states after a measurement position is moved to an auxiliary base position based on a movement amount relative to a stored first base position. A first calculation means performs fitting based on the light polarization states measured by a first model and the first measurement means corresponding to the first base position stored in a storage portion 15, and then calculates the film thickness or optical constant. Similarly, an auxiliary calculation means performs fitting based on the light polarization states measured by an auxiliary model and the auxiliary measurement means corresponding to the auxiliary base position stored in the storage portion 15, and then calculates the film thickness or optical constant. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I759495-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I468675-B |
| priorityDate | 2008-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986 |
Total number of triples: 21.