http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201026710-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J31-2295 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2009-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_312136817df77c6508ab06bf21a23e41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a796dbc129dc9e13674b8f50d94c5e99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a4b62a830c89cb7e620cb7cfadae20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75c66efa92867e9f7c25364e362e1c31 |
| publicationDate | 2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201026710-A |
| titleOfInvention | Ruthenium compound, process for producing same, process for producing ruthenium-containing thin film using same, and ruthenium-containing thin film |
| abstract | This invention aims at providing (2Wdimetbylpentadieny])-(ethylcyclopentadienyl)ruthenium which may contain its related structure compound, from which a ruthenium-containing thin film can be produced; a method of producing the same; a method of producing the rutheniumcontaining thin film using the same; the ruthenium-containing thin film; and the like. The invention relates to producing the thin film using, as a precursor, (2,4dimethylpentadienyl) (ethylcyclopentadienyl)ruthenium containing the related structure compound in an amount not more than 5% by weight, which can be obtained by separating the related structure compound from (2 to 4-dimethylpentadienyl) ethylcyclopentadienyl)rutbcnium containing the related structure compound. |
| priorityDate | 2008-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.