http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201023259-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2009-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2c572a9fc46a890ff2ed5259a49fd70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48cfc2ee567d4bc6deb81e8d5745616b |
| publicationDate | 2010-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201023259-A |
| titleOfInvention | Abrasive, polishing method, method for manufacturing semiconductor integrated circuit device |
| abstract | Provided is a polishing method for polishing a surface to be polished which includes a polysilicon film having a silicon dioxide film directly below, in manufacture of a semiconductor integrated circuit device. The polishing method includes a first polishing step wherein the polysilicon film is polished and planarized by using a first abrasive containing cerium oxide particles, water, and acid, and a second polishing step wherein the polysilicon film planarized in the first polishing step is polished by a second abrasive which contains at least cerium oxide particles, water, acid, and water-soluble polyamine or salt thereof, and the polishing is stopped when the silicon dioxide film is exposed. |
| priorityDate | 2008-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.