| abstract |
An etchant composition is provided. The etchant composition includes about 40 to about 65 wt% of phosphoric acid, about 2 to about 5 wt% of nitric acid, about 2 to about 20 wt% of acetic acid, about 0.1 to about 2 wt% of a compound containing phosphate, about 0.1 to about 2wt% of a compound simultaneously containing an amino group and a carboxyl group, and a remaining weight percent of water for the total weight of the composition. |