| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04H3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04H3-016 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D04H3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D04H3-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate |
2009-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ffb1b26ef132509b7975ab3d298afb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eff941ddc8883bac0bc1266ef5ddf334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f695a23255cd807d13c9cbb780959e9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e218796d4a09626819e1a1baf1e3882 |
| publicationDate |
2010-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201016393-A |
| titleOfInvention |
Polishing pad and the method for manufacturing the polishing pad |
| abstract |
The purpose of the present invention is to provide a polishing pad which is difficult to be scratched and has excellent performance such as flattening and polishing stabilization. One aspect of the invention is a polishing pad, which is characterized by that it has an extremely fine fiber complex composed of extreme fine fiber with average finenesss of 0.01 to 0.8dtex and a polymeric elastomer. Wherein, the glass transition temperature of the said polymeric elastomer is -10 DEG C or less, and its storage modulus of elasticity is from 90 to 900MPa between 23 DEG C and 50 DEG C, as well as its water absorbency is from 0.2 to 5 mass% when it saturated with water at 50 DEG C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I652140-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I799609-B |
| priorityDate |
2008-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |