http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201013762-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f033aefa3b1aa47ead7e2587f0f3f20a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad1c65265fdc9d197acaf21558567fc4 |
| publicationDate | 2010-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201013762-A |
| titleOfInvention | Liquid processing device |
| abstract | To provide, in a position adjacent to a processing target object, a rotating cup that directs a process liquid that has been used to process the processing target object to a discharge mechanism, and also to maintain a uniform gap between the supported processing target object and the rotating cup. A liquid processing device processes the bottom and side surfaces of a processing target object W. The liquid processing device comprises: a process liquid supply mechanism 37, 39 that supplies a process liquid to the processing target object W, a discharge mechanism 20, 21 that discharges the process liquid that has been used to process the processing target object W, a rotating cup 10 which is provided at the outer peripheral edge of the processing target object W and directs the process liquid that has been used to process the processing target object W to the discharge mechanism 20, 21, and a rotational drive unit 60 that rotates the rotating cup 10. A support member 15 that supports the peripheral edge of the processing target object W is provided on the rotating cup 10 so as to protrude inward from the inner peripheral edge thereof. |
| priorityDate | 2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 15.