| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0133 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2009-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2afe779a2c971e02cf48866c76f50d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d7943b6dd94ca4ea99676a78496b58a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6db2ef2af5d5a54801e90ac28381ede6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12be4aa41846a88cd8dc6e070a3a975d |
| publicationDate |
2010-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201012739-A |
| titleOfInvention |
MEMS device and method for manufacturing the same |
| abstract |
A MEMS device, including: a substrate having a first principal plane and a second principal plane opposite to the first principal plane; a through hole formed in the substrate; and a vibrating film formed over the first principal plane so as to cover the through hole. The first principal plane and the second principal plane are both a (110) crystal face; and the through hole has a substantially rhombic shape on the second principal plane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I490923-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9921238-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I595236-B |
| priorityDate |
2008-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |