http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201004490-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3669add0b345fe5a2d09f7ad13d6aaab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae12db0a23fa7787cf61d65298939b00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42945167881c218155424678168e0a25 |
| publicationDate | 2010-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201004490-A |
| titleOfInvention | Method for manufacturing shower plate, shower plate manufactured using the method, and plasma processing apparatus including the shower plate |
| abstract | The invention provides a manufacturing method of a shower plate with which a back flow of plasma is prevented, plasma excitation gases can be uniformly and stably supplied and during use, no component is dropped. A porous and columnar gas communicating body 11 is formed which includes gas pores communicated in a gas communicating direction. A tubular dense member 12, that covers a side surface of the gas communicating body 11 in contact therewith, is formed with a gas non-permeable material. The gas communicating body 11 is fitted into a hollow portion of the dense member 12 to form a porous piece body 13, and sintering is performed at a first temperature. A recessed part 10 is formed on a top plate 9, and a gas conduit is formed through the top plate 9 while communicating one end thereof with the recessed part 10. The porous piece body 13 is fitted into the recessed part 10 and integrally sintered at a temperature equal to or lower than the first temperature, thereby forming a shower plate 3. |
| priorityDate | 2008-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.