http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201003880-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-585 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 |
filingDate | 2009-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e2ac5aac83031ec55361d6e77551f0d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41a427a367ddcbe37a50aae7fa4ae540 |
publicationDate | 2010-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201003880-A |
titleOfInvention | Semiconductor device comprising a chip internal electrical test structure allowing electrical measurements during the fabrication process |
abstract | A test structure or a circuit element acting temporarily as a test structure may be provided within the die region of sophisticated semiconductor devices, while probe pads may be located in the frame in order to not unduly consume valuable die area. The electrical connection between the test structure and the probe pads may be established by a conductive path including a buried portion, which extends from the die region into the frame below a die seal, thereby maintaining the electrical and mechanical characteristics of the die seal. Hence, enhanced availability of electrical measurement data and superior authenticity of the data may be accomplished, wherein the measurement data may be obtained during the production process. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I465727-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I668847-B |
priorityDate | 2008-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.