| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0827 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate |
2009-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1bc2dff30608b2f604d14c15e7b8e8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dc7baf09b8832629e21c1b11ccb7c3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f52c05c06861fc86de0c47c4ad7b115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_622dde8c2099be29926ef87f19b87be6 |
| publicationDate |
2010-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201003715-A |
| titleOfInvention |
Techniques for providing a multimode ion source |
| abstract |
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I737863-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114277-B2 |
| priorityDate |
2008-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |