http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201002535-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0827 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24736 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M5-00 |
| filingDate | 2009-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8d60e30d721e0e44b7e20189aedc449 |
| publicationDate | 2010-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201002535-A |
| titleOfInvention | Method for forming a micro pattern using a transfer technique |
| abstract | A pattern transfer method includes: forming a dielectric film on a first substrate on which a concavo-convex pattern is formed; coupling together the first substrate and a second substrate with an intervention of the dielectric film, a fluorine-containing UV-ray-cured resin and a fluorine-free UV-ray-cured resin which are arranged in this order from the first substrate to the second substrate; separating the first substrate from the second substrate at an interface between the dielectric film and the fluorine-containing UV-ray-cured resin, to transfer the concavo-convex pattern onto the fluorine-containing UV-ray-cured resin. |
| priorityDate | 2008-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.