http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201000893-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a7c8179580a8082f8d9447ca5230ca5 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
filingDate | 2008-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb39817c101b687a736d12b23834e0cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94a7568c993aeab8b0d8900c93055634 |
publicationDate | 2010-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201000893-A |
titleOfInvention | Method of manufacturing gas sensing chip |
abstract | This invention provides a method of manufacturing a gas sensing chip which is utilized to sense ammonia and includes a sensing resistor having a circuit structure formed by a standard CMOS process and a sensing membrane made of nano-structured porous polyaniline by chemical polymerization. Because the nano-structured polyaniline has great sensibility and gas selectivity and it works with circuits that are manufactured by standard CMOS process, the polyaniline can sense the type and concentration of the gas accurately and rapidly in room temperature. In addition, the circuits and the sensing membrane are integrated into one chip so that the chip can be easily combined with other devices and can be batch-produced with standard commercialization process, which effectively reduces cost and improves market competition. |
priorityDate | 2008-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.