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publicationDate 2010-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201000760-A
titleOfInvention Bonded microfluidics system comprising CMOS-controllable microfluidic devices
abstract A microfluidic system comprising an integrated circuit having a bonding surface bonded to a polymeric microfluidics platform. The microfluidic system comprises one or more microfluidics devices controlled by control circuitry in the integrated circuit. At least one of the microfluidic devices comprises a MEMS actuator positioned in a MEMS layer of the integrated circuit. The MEMS layer is covered with a polymeric layer which defines the bonding surface of the integrated circuit.
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