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publicationDate 2009-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200952172-A
titleOfInvention Polycrystalline silicon layer, thin film transistor comprising the same, and fabricating method of the same
abstract Provided are a polycrystalline silicon layer in which resistance characteristics are excellent by forming the polycrystalline silicon layer having a Raman peak at 515 to 517 cm-l, which is shifted to the left from the conventional peak at 518 to 520 cm-l, a thin film transistor having the same, and a method of fabricating the thin film transistor.
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