| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D3-01 |
| filingDate |
2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4e139f87f4f45be9a16a1a811d71ba5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b63d3708b6041f857a82da470ecb6647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffc8f7e88bca5d83b63b81b3595aa06a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff9e49471388392aaab6bdfb9f18ca57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c118db6902d69ab85f6bf6a444bba7cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83468968b07650585456d79385517026 |
| publicationDate |
2009-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200949123-A |
| titleOfInvention |
Multiple ampoule delivery systems |
| abstract |
This invention relates to an integrated vapor or liquid phase reagent dispensing apparatus having a plurality of vessels and a plurality of carrier or inert gas feed/vapor or liquid phase reagent delivery manifolds, that may be used for continuously dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11773483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3739078-A1 |
| priorityDate |
2008-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |