| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0213 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02104 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02 |
| filingDate |
2009-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06610037564f839ef8e148b783df43f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d145d1bc3dc84a6835d453cfc808a1ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b4ccd24ad666c4a3d3c26f351768e7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d18f0487e15e20cdfed4eeb81349f3cf |
| publicationDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200947494-A |
| titleOfInvention |
A protective coating for a plasma processing chamber part and a method of use |
| abstract |
A flexible polymer or elastomer coated RF return strap is used in a plasma chamber to protect the RF strap from plasma generated radicals such as fluorine and oxygen radicals, and a method of processing a semiconductor substrate with reduced particle contamination in a plasma processing apparatus is provided. The coated RF strap minimizes particle generation and exhibits lower erosion rates than an uncoated base component. Such a coated member having a flexible coating on a conductive flexible base component provides an RF ground return configured to allow movement of one or more electrodes in an adjustable gap capacitively coupled plasma processing chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I512781-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I576917-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I552222-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I703609-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I656556-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10181412-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102456567-A |
| priorityDate |
2008-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |