| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B5-14 |
| filingDate |
2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84c515dee3118fc65fcf69ad4a133238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc03657e04998597e25939a638176bfc |
| publicationDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200947471-A |
| titleOfInvention |
Method and apparatus for deposition of transparent conductive film |
| abstract |
A method for deposition of transparent conductive film which forms a transparent conductive film including zinc oxide on a substrate by sputtering using a target including zinc oxide, wherein the sputtering is executed in a reactant gas atmosphere including two or more selected from hydrogen gas, oxygen gas and water vapor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I505498-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9309606-B2 |
| priorityDate |
2007-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |