http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200946279-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0009 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2009-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eff941ddc8883bac0bc1266ef5ddf334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ffb1b26ef132509b7975ab3d298afb8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6ffc0c870d6f86a0bfc04a26b8127e0 |
| publicationDate | 2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200946279-A |
| titleOfInvention | Method for manufacturing polishing pad |
| abstract | To provide a method for easily manufacturing polishing pad and a method for easily manufacturing sheet having transparent part useful for forming polishing layer of polishing pad. The polishing pad has a transparent part for performing inspection of worked-pieces and detection of polishing terminal by optical means in polishing during flatting the surface of worked-pieces such as semiconductor or integrated circuit. The method for manufacturing sheet comprises a step of compressing at least one part of a resin extruded as sheet form, and light transmission of the said compressed part of average thickness 1.5mm at wavelength 780 nm is 30% or more. The method for manufacturing polishing pad comprises a step of obtaining the said sheet, and a step of forming a polishing layer from the said sheet. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11219982-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10022842-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I647066-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11090778-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10722997-B2 |
| priorityDate | 2008-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 154.