http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200945479-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2009-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c413efe92bd8705d079d6f254458334 |
| publicationDate | 2009-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200945479-A |
| titleOfInvention | Organometallic compound supply device |
| abstract | An organometallic-compound supply device comprises a container into which an organometallic compound being solid at ordinary temperature is packed. A carrier gas is supplied to the container to sublimate the organometallic compound. The supply device is characterized in that it includes: a holding plate which is disposed in the container, holds the organometallic compound and permits the carrier gas to pass therethrough; a carrier gas inlet disposed in an upper part of the container; a carrier gas outlet which is situated at the bottom part of the container and open toward the lower part of holding plate; and a baffle which is mounted between the holding plate and the carrier gas outlet and is larger than the aperture of the carrier gas outlet, so that the carrier gas is passed downward from above through the organometallic compound packed on the holding plate. |
| priorityDate | 2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.