http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200938961-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-72 |
| filingDate | 2008-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10369f60242d2576bba765f969478df2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc88d76eaaef00c9e2de82bf06234df8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_483dc0323b902100c2303869b89c4b8e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df54fc550ad68a13fe75e5e61ca13883 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58a6a066b8e93fe7531638a1bc1f9cb0 |
| publicationDate | 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200938961-A |
| titleOfInvention | Source constructed and arranged to produce extreme ultraviolet radiation and method for producing extreme ultraviolet radiation |
| abstract | A radiation source is constructed and arranged to produce extreme ultraviolet radiation. The radiation source includes a chamber, a first electrode at least partially contained in the chamber, a second electrode at least partially contained in the chamber, and a supply constructed and arranged to provide a discharge gas to the chamber. The first electrode and the second electrode are configured to create a discharge in the discharge gas to form a plasma so as to generate the extreme ultraviolet radiation. The source also includes a gas supply constructed and arranged to provide a gas at a partial pressure between about 1 Pa and about 10 Pa at a location near the discharge. The gas is selected from the group consisting of hydrogen, helium, and a mixture of hydrogen and helium. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I713276-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11777271-B2 |
| priorityDate | 2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.