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publicationDate 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200938654-A
titleOfInvention Insulating film material, method of film formation using insulating film material, and insulating film
abstract The present invention provides an insulating film material for plasma CVD represented by the chemical formula (1), a method of film formation using the insulating film material, and the insulating film. According to the present invention, an insulating film having a dielectric constant and high copper diffusion barrier property suitable for an interlayer insulating film and the like of semiconductor devices can be obtained. [Chemical 1] In the chemical formula (1), n is an integer of 3 to 6; R1 and R2 are independently one of C2H, C2H3, C3H3, C3H5, C3H7, C4H5, C4H7, C4H9, C5H7, C5H9, and C5H11.
priorityDate 2008-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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