http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200937019-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2e497ceac333e4fe43bf87d03d3995f6 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06727 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8397bedd836763ec8b96ba67e4097340 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e69fd8d11283603c63b217acdcc60501 |
| publicationDate | 2009-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200937019-A |
| titleOfInvention | Probes of cantilever probe card |
| abstract | The probes of cantilever probe card (Epoxy probe card) are disclosed by the present invention. The means of the present invention mainly is to coat the probes of cantilever probe card with high conducting and polymeric materials on the surface of the probe tip about 5 to 10 mil with film thickness of 1 to 20 nm. Through this coating process, it can provide the excellent characteristics of No clean, high conductivity, low contact force and long lifetime for the probes of cantilever probe card. Accordingly the yield of wafer testing can be improved and the frequency of cleaning probe can be reduced and the total testing cost can be reduced. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I707145-B |
| priorityDate | 2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.