| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_799858790a0d932d2bf525d1f2324ad6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2203-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F2101-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-237613 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-237613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F35-833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-431 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F3-08 |
| filingDate |
2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dde82d7cfc8e2837bccc153bd3e3851d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7b2728d8839520bc43b6c05b2754666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb61f96b4a7462014fb5df43c797950c |
| publicationDate |
2009-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200932344-A |
| titleOfInvention |
Ozonated water mixture supply apparatus and method, and substrate treating facility with the apparatus |
| abstract |
Provided are an ozonated water mixture supply apparatus and method, and a substrate treating facility that receives an ozonated water mixture from the apparatus to treat a substrate. The ozonated water mixture supply apparatus includes a mixing line and distribution lines. The mixing line respectively receives a treating liquid and an ozonated water from a treating liquid supply line and an ozonated water supply line and mixes the treating liquid and the ozonated water to generate the ozonated water mixture satisfying a previously set concentration. Each of the distribution lines distributes the ozonated water mixture generated from the mixing line into a process unit. The mixing line includes a mixing valve and a static mixer. Therefore, the ozonated water mixture having the previously set concentration is generated and supplied using an in-line mixing method without requiring a mixing vessel such as a mixing tank. |
| priorityDate |
2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |