| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421d77005a57ea6126ae5f97445de0dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6773
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67796
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67333 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2009-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7143e9a68726da6f76ec1b9ddeb44bf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d452edc728a8fe04cc4346810631591f |
| publicationDate |
2009-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200931558-A |
| titleOfInvention |
Apparatus for inspecting semiconductor chip and method thereof |
| abstract |
Disclosed is an apparatus for inspecting semiconductor chip and a method thereof, and more particularly, to apparatus for inspecting semiconductor chip capable of inspecting appearance of semiconductor chips, and a method thereof. The apparatus for inspecting semiconductor chip includes a loading unit for loading a waffle pack loaded with a plurality of semiconductor chips; a vision inspection unit for receiving the waffle pack from the loading unit, and inspecting appearance of the semiconductor chips loaded in the waffle pack; a chip exchange unit for exchanging defective semiconductor chips inspected by the vision inspection unit into normal semiconductor chips; and an unloading unit for unloading the waffle pack received from the chip exchange unit. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108155112-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108155112-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I570823-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I420120-B |
| priorityDate |
2008-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |