abstract |
A transparent conductive film co-doped with chlorine, fluorine, and lithium ions includes a tin oxide co-doped with chlorine, fluorine, and lithium ions, wherein the tin oxide co-doped with chlorine, fluorine, and lithium ions has a chlorine doping concentration not more than 5at%, a fluorine doping concentration not more than 5at%, and a lithium doping concentration not more than 5at%, and the tin oxide co-doped with chlorine, fluorine, and lithium ions includes no indium ions. |