| abstract |
A pattern of a color filter is formed by forming a layer (16) containing an oxide of at least one metal selected from Ti, Ta, Zn and Zr on a supporting body (12), forming a colored layer (18) on the layer containing a metal oxide, and then removing a part of the colored layer by dry etching. Consequently, there is obtained a color filter which is characterized in that a layer containing an oxide of at least one metal selected from Ti, Ta, Zn and Zr is formed on a supporting body, and a colored layer is formed through the layer containing a metal oxide. Also disclosed is a solid-state imaging device (10) comprising such a color filter. |