| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C19-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B21K25-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50 |
| filingDate |
2008-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4429f9acb2afd525bb5d39fd188e354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3b77f1431947bd31e19c7b8413fcec0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a5a2794167904b4c96a65fe04c0f1f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa1f0c84a19d93eb79967a6fb8e19035 |
| publicationDate |
2009-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200925310-A |
| titleOfInvention |
Target designs and related methods for coupled target assemblies, methods of production and uses thereof |
| abstract |
Sputtering targets are described that comprise: (a) a target surface component comprising a target material; (b) a core backing component having a coupling surface, a back surface and at least one open area, wherein the coupling surface is coupled to at least part of the target surface component; and wherein at least part of the target surface component fits into at least one open area of the core backing component. In some embodiments, the target surface component, the core backing component or a combination thereof have at least one surface area feature coupled to or located in the back surface of the core backing component, the target surface component or a combination thereof, wherein the surface area feature increases the cooling effectiveness of the target surface component. Methods of forming a sputtering target are also described that comprises: (a) providing a target surface component comprising a surface material; (b) providing a core backing component having a coupling surface, a back surface and at least one open area; (c) coupling the coupling surface to at least part of the target surface component, wherein at least part of the target surface component fits into the at least one open area of the core backing component. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I694980-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I414632-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I399447-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I400357-B |
| priorityDate |
2007-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |