| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a0633252d059c1aa71eafe834dd1f16 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16195
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00333 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
| filingDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f902270c02ae89f282c9d29bcdae47ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_076fdb5a2b1933bf3b2c462f39492d2f |
| publicationDate |
2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200919593-A |
| titleOfInvention |
Elements and modules with micro caps and wafer level packaging method thereof |
| abstract |
A wafer level packaging method for elements with micro caps includes steps of: smearing a photoresist layer as a sacrifice layer on an element wafer on which a plurality of element units are preformed; pattering the sacrifice layer, forming a cap structure layer on the sacrifice layer; and removing the sacrifice layer. As a result, a micro cap is formed on each element unit. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I458409-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I421983-B |
| priorityDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |