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filingDate 2008-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200919045-A
titleOfInvention Layered structure and its manufacturing method
abstract To provide a laminated structure and a method for manufacturing the same, in which an Al alloy is directly connected to an oxide transparent conductive film without increasing contact electrical resistance between the oxide transparent conductive film and the Al alloy film, the wiring resistance is reduced, and galvanic corrosion is prevented in an electrolytic solution such as a developer. The method for manufacturing the laminated structure having the oxide transparent conductive film and the Al alloy film directly connected to each other is provided with: a first step to form the oxide transparent conductive film on a substrate; a second step to form the Al alloy film which contains an alloy component having ionization tendency less than that of aluminum on the oxide transparent conductive film; and a third step to heat the Al alloy film to a temperature equal to or more than a deposition temperature of an intermetallic compound composed of aluminum and the alloy component.
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